Development and use of a large area ultralow energy reactive ion beam
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 103-106
- https://doi.org/10.1016/0168-583x(89)90144-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Development of a 200 kV high current accelerator with post acceleration mass analysis for O+ implantation into siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Intense ion beamsReports on Progress in Physics, 1974
- Currents Limited by Space Charge between Concentric SpheresPhysical Review B, 1924