Texture control and interfacial structures of SrBi2Ta2O9 thin films on Pt
- 13 July 1998
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (2) , 166-168
- https://doi.org/10.1063/1.121744
Abstract
The influence of the Pt bottom electrode orientation on the growth of (SBT) films was elucidated in terms of the atomic matching at the SBT/Pt interfaces. A highly c-axis oriented SBT film was grown on the Pt (001) plane since the SBT plane conjugates well with the Pt (001) plane from a crystallographic point of view. Both the strong and SBT peaks were found in the x-ray diffraction profile when the SBT film was grown on the Pt (111) surface. It was found that not a single SBT plane can match with the whole Pt (111) plane due to the appreciably different atomic configurations. The cross-sectional transmission electron microscopy image revealed that the SBT/Pt interface was structurally stable after heat treatment at 750 °C.
Keywords
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