Abstract
Observations on small-angle diffraction rings from very thin vapor-deposited layers have been carried out using a direct-recording electron diffractometer. The rings are due to the island structure of the deposited layers. A detailed correlation has been made between ring location and island/island interferences by statistical evaluation of electron micrographs. (The occurrence of inner diffraction rings from various types of specimens was first noted by Mahl and Weitsch using an electron-microscope technique.)

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