Stress and defects in silicate films and glasses
- 1 May 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 18 (3) , 1749-1751
- https://doi.org/10.1116/1.591465
Abstract
Both silicate films of technological interest and commercial silicate glasses exemplify atomic networks with low defect densities. Although the films and glasses are prepared differently, they appear to exhibit many similar chemical trends. Here these trends are discussed in detail for the glasses, and features of the very large glass database which may be relevant to films are identified.Keywords
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