Simulation of heating in powerful electron lithography
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 187-190
- https://doi.org/10.1016/0167-9317(94)00086-a
Abstract
No abstract availableKeywords
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- Kilovolt electron energy loss distribution in SiJournal of Physics D: Applied Physics, 1988
- Kilovolt Electron Energy Loss Distribution in GaAsPPhysica Status Solidi (a), 1984