Surface analysis of insulating materials by Secondary Ion Mass Spectrometry (SIMS)
- 1 August 1976
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 10 (4) , 317-324
- https://doi.org/10.1007/bf00920616
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Surface investigation of solids by the statical method of secondary ion mass spectroscopy (SIMS)Surface Science, 1973
- A New Analytical Technique for Insulating Materials by Means of an Ion MicroanalyzerJournal of the Mass Spectrometry Society of Japan, 1972
- Negative Ion Bombardment of Insulators to Alleviate Surface Charge-UpJournal of Applied Physics, 1969
- Cesium-Ion Bombardment of Aluminum Oxide in a Controlled Oxygen EnvironmentJournal of Applied Physics, 1967
- Untersuchungen zum Spektrum und den Anfangsenergien negativer SekundärionenThe European Physical Journal A, 1967
- Étude d’une méthode d’analyse locale chimique et isotopique utilisant l’émission ionique secondaireAnnales de Physique, 1964