Kinetic Studies of the Electron-Beam-Pumped ArF Laser Using an Ne/Ar/F2 Mixture

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Abstract
By experimentally optimizing the operational parameters for the electron-beam-excited ArF laser, an intrinsic efficiency of 4.4% was obtained for a 4 atm Ne/Ar/F2 mixture pumped by a 50 ns pulse at an excitation rate of 1.4 MW/cm3. Under these conditions, the measured net gain was 5.5%cm-1, which agrees well with the value of 6.0%cm-1 estimated from a modified version of Rigrod's theory. Assuming an infinite V-T relaxation rate for ArF*(B), the small-signal gain and absorption were estimated as 6.4%cm-1 and 0.35%cm-1, respectively. With an Ar/F2 mixture, it was difficult to obtain efficient ArF lasing, while with a Ne/Ar/F2 mixture, efficient lasing was readily obtainable even at low excitation rates. This is attributed mainly to the fact that the ArF* deactivation rate to form Ar2F* trimer if faster with Ar gas than with Ne gas.

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