Comparison of diamond-like carbon films deposited from 40 kHz and 13.56 MHz r.f. plasmas
- 30 April 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (3-5) , 445-447
- https://doi.org/10.1016/0925-9635(95)00462-9
Abstract
No abstract availableKeywords
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