Criterions for Basic Assumptions in Kick-Out Mechanism of Diffusion
- 1 November 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (11) , 2033-2036
- https://doi.org/10.1143/jjap.20.2033
Abstract
Basic equations of diffusion by kick-out mechanism are non-linear. To obtain the solutions of these equations analytically, it is necessary to assume that interstitial impurity or interstitial silicon atoms are in thermal equilibrium. To obtain criterions for these assumptions, the basic equations are linearized under the conditions that concentrations of substitutional impurity, interstitial impurity and interstitial silicon atoms approach their thermal equilibrium values. It is found that the thermal equilibrium concentration as well as the diffusion coefficient is an important factor for the criterions.Keywords
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