Microactuators for GaAs-based microwave integrated circuits
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- The integration of micro-machine fabrication with electronic device fabrication on III-V semiconductor materialsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- GaAs MMIC yield modelingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Principles in design and microfabrication of variable-capacitance side-drive motorsJournal of Vacuum Science & Technology A, 1990
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Micromechanical light modulator array fabricated on siliconApplied Physics Letters, 1977