Micromachined silicon microvalve
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Normally close microvalve and micropump fabricated on a silicon waferPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A constant flow-rate microvalve actuator based on silicon and micromachining technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of siliconSensors and Actuators, 1989