Silicon Microreactors made by Reactive Ion Etching
- 1 January 1998
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- MEMS fabrication by Lithography and Reactive Ion Etching (LIRIE)Microelectronic Engineering, 1995
- Surface science aspects of etching reactionsSurface Science Reports, 1992
- Microwave plasma etching of Si and SiO2 in halogen mixtures: Interpretation of etching mechanismsJournal of Vacuum Science & Technology B, 1989
- Phenomena produced by ion bombardment in plasma-assisted etching environmentsJournal of Vacuum Science & Technology A, 1988