Development of a complex heat resistant hard coating based on (Ta,Si)N by reactive sputtering
- 29 January 2000
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 62 (2) , 115-121
- https://doi.org/10.1016/s0254-0584(99)00142-x
Abstract
No abstract availableKeywords
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