Oxygen-Trapping and Oxidation Induced by Laser Irradiation in Silicon
- 1 January 1981
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Oxidation of silicon by ion implantation and laser irradiationApplied Physics Letters, 1981
- Rapid oxidation via adsorption of oxygen in laser-induced amorphous siliconApplied Physics Letters, 1981
- The Growth and Characterization of Very Thin Silicon Dioxide FilmsJournal of the Electrochemical Society, 1980
- SURFACE SEGREGATION IN LASER ANNEALING OF ION-IMPLANTED SILICONPublished by Elsevier ,1980
- SOLUTE TRAPPINGPublished by Elsevier ,1980
- Order-Disorder Transition in Single-Crystal Silicon Induced by Pulsed uv Laser IrradiationPhysical Review Letters, 1979