Quantitative Electron Energy‐Loss Measurements on the System ZrO2‐CaO

Abstract
The accuracy of present EELS quantification procedures has been assessed using a directionally solidified eutectic in the system ZrO2‐CaO. In the present study, Ca/O ratios were determined under various operating and analysis conditions and showed good agreement with values calculated from the stoichiometry. Systematic errors in the EELS data were attributed to difficulties in fitting the Ca edge, due to the proximity of other edges in the spectrum, highlighting one of the major problems associated with analysis of multicomponent systems. In addition, sharp discontinuities in the Ca/O ratio were observed when profiling across lamellar interfaces, indicating that EELS shows good sensitivity to abrupt changes in composition and has potential for quantitative light element analysis.