System design for cooperative control of arrayed microactuators
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A proposal for a conveyance system with autonomous decentralized micro modulesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Cooperative work of arrayed microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A conveyance system using air flow based on the concept of distributed micro motion systemsJournal of Microelectromechanical Systems, 1994