A proposal for a conveyance system with autonomous decentralized micro modules
- 30 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A planar air levitated electrostatic actuator systemPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A conveyance system using air flow based on the concept of distributed micro motion systemsJournal of Microelectromechanical Systems, 1994
- Silicon micromechanics: sensors and actuators on a chipIEEE Spectrum, 1990