A comparison of surface analysis using ion scattering, ion-produced photons, and secondary ion emission
- 1 October 1978
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 33 (7) , 576-578
- https://doi.org/10.1063/1.90465
Abstract
ISS, SIMS (recoil target ions), and ion-produced photon emission (IPP) from surfaces subject to low-energy ion bombardment have been compared by simultaneous measurement of the effect of reactive gas adsorption on each signal. A direct correlation between the three signal strengths has been established. Cross sections for desorption of CO from Ni due to low-energy ion bombardment have been measured independently and simultaneously by two of the three methods.Keywords
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