A comparison of surface analysis using ion scattering, ion-produced photons, and secondary ion emission

Abstract
ISS, SIMS (recoil target ions), and ion-produced photon emission (IPP) from surfaces subject to low-energy ion bombardment have been compared by simultaneous measurement of the effect of reactive gas adsorption on each signal. A direct correlation between the three signal strengths has been established. Cross sections for desorption of CO from Ni due to low-energy ion bombardment have been measured independently and simultaneously by two of the three methods.