Rapid laser scanning for Si-on-insulator devices
- 30 April 1983
- journal article
- Published by Elsevier in Materials Letters
- Vol. 1 (5) , 184-188
- https://doi.org/10.1016/0167-577x(83)90014-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Stacked transistors CMOS (ST-MOS), an NMOS technology modified to CMOSIEEE Transactions on Electron Devices, 1982
- Annular grain structures in pulsed laser recrystallized Si on amorphous insulatorsApplied Physics Letters, 1981
- One-gate-wide CMOS Inverter on laser-recrystallized polysiliconIEEE Electron Device Letters, 1980
- Defect Etch for Silicon EvaluationJournal of the Electrochemical Society, 1979