Ruthenium Oxide Nanotube Arrays Fabricated by Atomic Layer Deposition Using a Carbon Nanotube Template
- 16 June 2003
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 15 (12) , 1019-1022
- https://doi.org/10.1002/adma.200304452
Abstract
A chemical vapor deposition‐related method (atomic layer deposition) is reported to have been successfully used to fabricate an inorganic nanotube array at low temperatures (below 400 °C) for the first time. The Figure shows a scanning electron microscopy image of a ruthenium oxide nanotube array on top of an anodic aluminum oxide (AAO) matrix on a silicon wafer after removal of the carbon nanotube template.Keywords
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