Micropipe and dislocation density reduction in 6H-SiC and 4H-SiC structures grown by liquid phase epitaxy
- 1 April 1998
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 27 (4) , 292-295
- https://doi.org/10.1007/s11664-998-0402-y
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- SiC liquid-phase epitaxy on patterned substratesJournal of Crystal Growth, 1996
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- Performance limiting micropipe defects in silicon carbide wafersIEEE Electron Device Letters, 1994
- Silicon carbide and SiC-AIN solid-solution p-n structures grown by liquid-phase epitaxyPhysica B: Condensed Matter, 1993