Exploiting the properties of carbon nanotubes for nanolithography
- 14 September 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (11) , 1508-1510
- https://doi.org/10.1063/1.122188
Abstract
Carbon nanotube tips are explored in fabricating oxide nanostructures on silicon surfaces with an atomic force microscope. Nanotubes can write nanostructures at speeds up to 0.5 mm/s over large surface areas, and present a solution to the long-standing tip-wear problem. Experimental and theoretical work find that nanotube tips are impervious to high compressive and lateral forces and breakdown in high electric fields. A “cleaving” method is developed to reproducibly obtain dome-closed multi-walled nanotube tips with suitable length. Nanotube materials could become key elements for future miniaturization applications.Keywords
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