Device Fabrication by Scanned Probe Oxidation
- 8 December 1995
- journal article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 270 (5242) , 1625
- https://doi.org/10.1126/science.270.5242.1625
Abstract
Precision Engineering Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. E-mail: john.dagata@nist.gov Imaging by scanning a tiny probe across a surface is a well-established technique for nanometer microscopy; now researchers are using these probes to manipulate matter and create small structures. In his Perspective, Dagata describes “an important milestone” reported in the same issue by Snow and Campbell ( p. 1639 ), in which small oxidized structures were created with a scanning probe microscope.This publication has 17 references indexed in Scilit:
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