Control of Current in 2DEG Channel by Oxide Wire Formed Using AFM
- 1 February 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (2S) , 1329
- https://doi.org/10.1143/jjap.34.1329
Abstract
We have succeeded in depleting a two-dimensional electron gas channel using an oxide wire formed with an atomic force microscope. Currents in the channel depend on the height of the oxide wire on the delta-doped high-electron-mobility transistor. The current in the sample with a 20 nm-thick oxide wire is approximately one hundred times lower than that without the wire.Keywords
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