Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography
- 30 August 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (9) , 1288-1290
- https://doi.org/10.1063/1.110771
Abstract
A scanning tunneling microscope was employed for tip-induced anodization of titanium (Ti) surfaces. Spatial resolution of fabricated patterns was remarkably affected by the tip shape and humidity in the atmosphere. The amount of adsorbed water on the Ti surface determined by humidity has a key role in controlling the resolution, and the resolution becomes worse with increasing humidity. Under the optimized conditions, tip-induced anodization of Ti was successfully achieved with a spatial resolution of 30 nm.Keywords
This publication has 6 references indexed in Scilit:
- Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling MicroscopyJapanese Journal of Applied Physics, 1993
- Photoexcitation Effects on Scanning Tunneling Microscope Images of Surface Oxide Layer of TitaniumJapanese Journal of Applied Physics, 1992
- Integration of scanning tunneling microscope nanolithography and electronics device processingJournal of Vacuum Science & Technology A, 1992
- Pattern generation on semiconductor surfaces by a scanning tunneling microscope operating in airJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Nanolithography on semiconductor surfaces under an etching solutionApplied Physics Letters, 1990
- Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in airApplied Physics Letters, 1990