Excimer laser ablation patterning of dielectric layers
- 1 February 1995
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 86 (1-4) , 228-233
- https://doi.org/10.1016/0169-4332(94)00416-1
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- The influence of thermal diffusion on laser ablation of metal filmsApplied Physics A, 1994
- Time resolved reflectivity and transmission measurements during laser induced blow-off of thin metal filmsApplied Surface Science, 1993
- Non-destructive reading of laser-induced single-shot incubation in dielectric coatingsApplied Physics A, 1993
- Laser induced forward transfer: The effect of support-film interface and film-to-substrate distance on transferApplied Physics A, 1992
- Multishot ablation of polymer and metal films at 248 nmApplied Surface Science, 1992
- Femtosecond-excimer-laser patterning of YBa2Cu3O7 filmsApplied Physics A, 1991
- Influence of the substrate on the temperature induced by pulsed laser irradiation of thin filmsApplied Surface Science, 1990
- Time-resolved transmission of thin gold films during laser blow-offApplied Physics Letters, 1989
- Metal deposition from a supported metal film using an excimer laserJournal of Applied Physics, 1986
- Metal film removal and patterning using a XeCl laserApplied Physics Letters, 1983