Surface Micromachined Microengane As The Driver For Micromechanical Gears
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 365-368
- https://doi.org/10.1109/sensor.1995.717205
Abstract
The transmission of mechanical power is often accomplished through the use of gearing. The recently developed surface micromachined microengine [1] provides us with an actuator which is suitable for driving surface micromachined geared systems. In this paper we will present aspects of the rnicroengine as they relate to the driving of geared mechanisms, issues relating to the design of micro gear mechanisms, and details of a design of a microengine-driven geared shutter mechanism.Keywords
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