In situ friction and wear measurements in integrated polysilicon mechanisms
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 184-188
- https://doi.org/10.1016/0924-4247(90)85035-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Normally closed microvalve and mircopump fabricated on a silicon waferSensors and Actuators, 1989
- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- Micro gears and turbines etched from siliconSensors and Actuators, 1987