Normally closed microvalve and mircopump fabricated on a silicon wafer
- 1 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2) , 163-169
- https://doi.org/10.1016/0250-6874(89)87114-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Prototype miniature blood gas analyser fabricated on a silicon waferSensors and Actuators, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988