Subangstrom Resolution by Underfocused Incoherent Transmission Electron Microscopy

Abstract
It is quantitatively explained why incoherent transmission electron microscope imaging is extremely robust to the effects of chromatic aberration, which usually limits the resolution in the conventional coherent mode of imaging. Combining this robustness with using underfocus to counter the effects of spherical aberration, we demonstrate subangstrom lattice resolution and information transfer to 0.078 nm.