Heavily Carbon-Doped P-Type InGaAs Grown by Metalorganic Molecular Beam Epitaxy

Abstract
In order to overcome a problem of the lattice mismatch between heavily carbon-doped p-GaAs and moderately doped GaAs, we have grown heavily carbon-doped InGaAs with a hole concentration of 2.6×1020 cm-3 and resistivity of 6.5×10-4 Ω·cm by MOMBE, in which the indium content was adjusted so that its lattice constant became equal to that of SI GaAs. In the lattice-matched InGaAs, the indium molar fraction determined from the Raman spectrum and the bandgap from the 4.2 K photoluminescence spectrum are 0.05 and 1.396 eV, respectively.