Computer-simulation des schichtwachstums bei dünnen polymerschichten, hergestellt in einer glimmentladung
- 31 March 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 21 (1) , 1-9
- https://doi.org/10.1016/0040-6090(74)90083-2
Abstract
No abstract availableKeywords
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