Effect of oxygen plasma annealing on superconducting properties of Bi2(Sr,Ca)3Cu2Ox and YBa2Cu3O7−δ thin films

5 February 1990

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 56 (6) , 575-577
https://doi.org/10.1063/1.103302

Abstract

Thin films of the Bi₂(Sr,Ca)₃Cu₂O_x and YBa₂Cu₃O_7−δ system were annealed at 400 °C in a high‐density oxygen plasma and its effect on superconducting properties was investigated. After being annealed in the oxygen plasma, their superconducting transition temperatures decreased by about 10 K and 2 K, respectively, and the c‐axis lattice constants of these films were also found to decrease as a result of the annealing in the oxygen plasma. These results suggest that excessive oxygen incorporated into the films by the annealing in the oxygen plasma caused the excessive hole carriers, which deteriorated the superconducting transition temperatures of these films.

Keywords

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