Ion implantation of silicon carbide
- 8 October 2001
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 186 (1-4) , 186-194
- https://doi.org/10.1016/s0168-583x(01)00880-1
Abstract
No abstract availableKeywords
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