SCANNING CW-LASER-INDUCED CRYSTALLIZATION OF SILICON ON AMORPHOUS SUBSTRATES
- 1 January 1980
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Crystallographic orientation of silicon on an amorphous substrate using an artificial surface-relief grating and laser crystallizationApplied Physics Letters, 1979
- cw laser recrystallization of 〈100〉 Si on amorphous substratesApplied Physics Letters, 1979
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- Periodic regrowth phenomena produced by laser annealing of ion-implanted siliconApplied Physics Letters, 1978
- CO2 laser-produced ripple patterns on NixP1−x surfacesApplied Physics Letters, 1977
- V-1 laser fabrication of large-area arrays: Thin-film silicon isolated devices on fused Silica substratesIEEE Transactions on Electron Devices, 1974