Very high current ECR ion source for an oxygen ion implanter
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1-4) , 178-181
- https://doi.org/10.1016/0168-583x(87)90820-2
Abstract
No abstract availableKeywords
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- Microwave ion source for high-current implanterReview of Scientific Instruments, 1978