Electron backscattering from thin silicon crystals
- 1 June 1978
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 49 (6) , 3595-3596
- https://doi.org/10.1063/1.325224
Abstract
Very thin silicon crystals (600–7000 Å) were produced by a combined thinning technique starting from silicon wafers. The backscattering of 15–35‐keV electrons from these crystals was measured. The reduced backscattering rate is proportional to the thickness of the specimen but is much higher than theoretically expected. Extrapolation to zero backscattering rate, however, leads to a thickness of 140 Å. Both of these facts lead to the conclusion that plural scattering predominates.This publication has 4 references indexed in Scilit:
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- Dünne Siliziumeinkristalle und ihre ElektroneninterferenzenThe European Physical Journal A, 1965
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