Preparation of Nearly Stoichiometric Superconducting Y-Ba-Cu-O Films by an MOCVD Technique Using Ozone
- 1 November 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (11A) , L2041
- https://doi.org/10.1143/jjap.29.l2041
Abstract
Superconducting Y-Ba-Cu-O films of nearly stoichiometric composition (Y:Ba:Cu=1:2:3.6) were prepared by an MOCVD technique on MgO(100) substrates at 650°C without postannealing. By introducing ozone into the reactor, we obtained a film with higher zero resistive temperature (75 K) and better surface morphology and c-axis orientation, compared to a film of the same composition prepared without ozone.Keywords
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