Resputtering of low-energy implanted inert gases: An angle-resolved time-of-flight study
- 1 December 1989
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 43 (1-4) , 363-368
- https://doi.org/10.1016/0169-4332(89)90240-7
Abstract
No abstract availableKeywords
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