Fabrication and testing of trilayers with a high deposition rate plasma-polymerized spacer
- 21 October 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 108 (3) , 365-371
- https://doi.org/10.1016/0040-6090(83)90085-8
Abstract
No abstract availableKeywords
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