A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture
- 1 April 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 19 (2) , 102-112
- https://doi.org/10.1109/27.106803
Abstract
No abstract availableKeywords
This publication has 29 references indexed in Scilit:
- A model for the discharge kinetics and plasma chemistry during plasma enhanced chemical vapor deposition of amorphous siliconJournal of Applied Physics, 1988
- Neutral radical deposition from silane dischargesJournal of Applied Physics, 1988
- Measurement of the ionisation and attachment coefficients in monosilane and disilaneJournal of Physics D: Applied Physics, 1986
- Theory of negative corona in oxygenPhysical Review A, 1985
- A critical analysis of ionising wave propagation mechanisms in breakdownJournal of Physics D: Applied Physics, 1980
- Discharge current induced by the motion of charged particlesJournal of Physics D: Applied Physics, 1980
- Undervoltage breakdown between parallel plates in airJournal of Physics D: Applied Physics, 1979
- Fully multidimensional flux-corrected transport algorithms for fluidsJournal of Computational Physics, 1979
- Prebreakdown current growth and the ionization coefficients in hydrogenJournal of Physics D: Applied Physics, 1977
- Simulation of electron swarm motion in hydrogen and carbon monoxide for high E/NJournal of Physics D: Applied Physics, 1977