Review of oxidation processes in plasmas†
- 1 January 1983
- journal article
- review article
- Published by Elsevier in Journal of Physics and Chemistry of Solids
- Vol. 44 (5) , 353-364
- https://doi.org/10.1016/0022-3697(83)90063-x
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
- Review of oxide formation in a plasmaPlasma Chemistry and Plasma Processing, 1981
- Plasma stream transport method (2) Use of charge exchange plasma sourceJournal of Vacuum Science and Technology, 1978
- Plasma anodization of GaAs in a dc dischargeJournal of Vacuum Science and Technology, 1978
- Auger Spectroscopic Evidence That Plasma Anodization Involves Mass Transfer from the Cathode to the AnodeJournal of the Electrochemical Society, 1978
- Plasma stream transport method (1) Fundamental concept and experimentJournal of Vacuum Science and Technology, 1978
- On the Mechanism of GaAs AnodizationJournal of the Electrochemical Society, 1977
- Multipurpose plasma reactor for materials research and processingJournal of Vacuum Science and Technology, 1977
- Preparation and properties of plasma-anodized silicon dioxide filmsSolid-State Electronics, 1974
- A New Technique for High Speed Anodization in a dc Oxygen Glow DischargeJournal of Vacuum Science and Technology, 1973
- Phase-Locking of Laser Oscillators by Injected SignalJournal of Applied Physics, 1967