The characteristics of a planar magnetron operated at a high power input

This publication has 3 references indexed in Scilit:

• The dependence of deposition rate on power input for dc and rf magnetron sputtering
  Vacuum, 1981
• The construction of small planar magnetrons for sputtering use
  Vacuum, 1981
• Sputtering—a review of some recent experimental and theoretical aspects
  Applied Physics A, 1975