A RIE process for submicron, silicon electromechanical structures
- 1 March 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (1) , 31-38
- https://doi.org/10.1088/0960-1317/2/1/007
Abstract
No abstract availableKeywords
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