Occurrence and origin of copper oxide particulates prior to the deposition of YBaCuO thin films

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Abstract
Using chemical vapour deposition, CVD the surface morphology of YBaCuO films was studied. It is shown that uncontrolled condensation of mainly copper oxide crystallites onto the substrate can occur prior to film deposition. After film deposition these crystallites are still present. The source is oxygenous material, for instance residues from former runs. The predeposition effect seems not to be restricted to the CVD process, and can be avoided by appropriate methods.
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