Abstract
The resistivity of the V-Al alloy films of various thicknesses and compositions was studied as a function of temperature. The films were evaporated using an electron gun in a vacuum of 10-5 Pa onto quartz substrates held at room temperature. The resistivity measurements were carried out in situ in vacuum of 10-8-10-6 Pa in the temperature range 300-830 K. It was found that the resistivity dependence on temperature was anomalous, i.e., the resistivity saturation effect occurred. An analysis of this effect was performed on the basis of the shunt resistance model.