Grating interferometer for flatness testing
- 1 February 1996
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 21 (3) , 228-230
- https://doi.org/10.1364/ol.21.000228
Abstract
Two diffraction gratings placed in front of a flat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 μm, depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.Keywords
This publication has 3 references indexed in Scilit:
- Holographic reference glass for surface planeness testingPublished by SPIE-Intl Soc Optical Eng ,1994
- Space-invariant achromatic grating interferometers: theoryApplied Optics, 1975
- Optical Contour Mapping of SurfacesApplied Optics, 1973