Microstructure Fabrication
- 27 May 1977
- journal article
- research article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 196 (4293) , 945-949
- https://doi.org/10.1126/science.193190
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Deep-UV Conformable-Contact Photolithography for Bubble CircuitsIBM Journal of Research and Development, 1976
- Reduction of photoresist standing-wave effects by post-exposure bakeIEEE Transactions on Electron Devices, 1975
- Optical lithographyIEEE Transactions on Electron Devices, 1975
- Large-Scale Integration ai the Revolution in ElectronicsScience, 1969
- Current Status of Large Scale Integration TechnologyIEEE Journal of Solid-State Circuits, 1967