LIF and OES detection of radical species in SiF4 + H2 plasmas
- 1 July 1984
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 66 (1-2) , 39-43
- https://doi.org/10.1016/0022-3093(84)90295-3
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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