Control composition study of sputtered NiTi shape memory alloy film
- 30 November 1995
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 34 (2-3) , 112-115
- https://doi.org/10.1016/0921-5107(95)01237-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Shape Memory AlloysMRS Bulletin, 1993
- Oriented nickel-titanium shape memory alloy films prepared by annealing during depositionApplied Physics Letters, 1992
- Shape-memory properties in Ni-Ti sputter-deposited filmJournal of Applied Physics, 1990
- The thermalization of energetic atoms during the sputtering processJournal of Vacuum Science & Technology A, 1984
- Energy Distribution of Atoms Sputtered from Polycrystalline MetalsJournal of Applied Physics, 1969